Soft X-rays and Extreme Ultraviolet Radiation

Soft X-rays and Extreme Ultraviolet Radiation

Principles and Applications

eBook - 2000
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"This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--Jacket.
Publisher: Cambridge ; New York : Cambridge University Press, 2000
ISBN: 9781139648936
1139648934
9781139164429
1139164422
9780521652148
0521652146
Characteristics: 1 online resource (xvi, 470 pages) : illustrations (some color)

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